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This chapter provides an overview of Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS), focusing on their fundamental principles, fabrication methods, and diverse industrial applications. It examines how nanomaterials enhance the performance of these miniaturized systems and discusses their implementations in medicine and engineering. The chapter also addresses key challenges related to manufacturing and reliability while analyzing current technological trends. Special emphasis is placed on the integration of artificial intelligence and Internet of Things with MEMS/NEMS, offering insights into how these microscale and nanoscale systems are transforming modern technology.

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MEMS and NEMS Based on Nanomaterials

  • 章节

  • 发表日期：

    2025年

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  • Dr. Alok Kumar Srivastav,
  • Dr. Priyanka Das

摘要

This chapter provides an overview of Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS), focusing on their fundamental principles, fabrication methods, and diverse industrial applications. It examines how nanomaterials enhance the performance of these miniaturized systems and discusses their implementations in medicine and engineering. The chapter also addresses key challenges related to manufacturing and reliability while analyzing current technological trends. Special emphasis is placed on the integration of artificial intelligence and Internet of Things with MEMS/NEMS, offering insights into how these microscale and nanoscale systems are transforming modern technology.