Nanoscale Multi-gate Graded Channel DG-MOSFET for Reduced Short Channel Effects
摘要
Aggressive scaling of MOSFET results in degradation in their performance due to different short channel effects. The problem was addressed by use of high-k dielectric followed by different structural modifications. Among different modified devices, DG-MOSFET seems to be promising one due to scalability, simple structure and offering better control on channel. However, to obtain enhanced performance further structural modification of DG-MOSFET was introduced. This study aims at performance analysis of DG-MOSFET with graded channel and multi-gate. The results clearly indicate reduced DIBL effect for modified DG-MSFET structure.