Dynamical Modeling and Identification of a High-Performance MEMS Accelerometer with Effective Stiffness Electrostatically Tuned Around Zero
摘要
To further investigate the impact of effective stiffness on dynamical behavior of MEMS accelerometer, we developed a dynamical model for an accelerometer with effective electrostatically tuned around zero and proposed a real-time identification method of its effective stiffness. The reliability of the model was verified through frequency response experiments. The effect of effective stiffness on the force-balanced closed-loop accelerometer was investigated through the analysis of its dynamic characteristics and equivalent input noise. A novel method of stiffness identification by analyzing the response of mechanical thermal noise was established. This method does not require any additional excitation signal, ensuring little impact on the performance of the accelerometer.