Thermal Sensing Behavior of SiC Schottky Diode in 200–600 K

This work describes a high-temperature probe that may be used in industrial settings as a trustworthy alternative to thermocouples with a short life duration. As legislation aimed at reducing the industrial impact on the environment progresses, precise temperature control and energy efficiency have emerged as critical research areas, exerting ever-increasing criteria from temperature sensors. Silvaco TCAD’s ATLAS module is used to design Pt/4H-SiC Schottky diode and its thermal sensitivity is observed in the current range of 1–50 nA and in the temperature range 200–600 K. Sensor is found to be well operational within this temperature range and temperature sensitivity is observed its maximum value at 1 nA which is 3.15 mV/K.