Advanced Characterization and Testing Techniques

With the rapid development of integrated circuit process technology, advanced electronic materials are widely applied in the IC devices. The advanced material characterization technologies are used to research and develop new electronic materials, especially for the characterization of nanoscale materials or in extreme experimental conditions. Meanwhile, as the IC chip integration continues to increase, the function of the chip is becoming more and more complex, and more requirements are put forward to the test of IC chip. This chapter focuses on the advanced material characteristics and IC testing techniques, such as conductive atomic force microscope, atom probe tomography, inelastic electron tunneling spectroscopy, technology of femtosecond lasers, power-aware Testing, 3D IC testing, etc. The principle and application of advanced characterization and testing techniques are discussed.