New Materials Used in IC

Integrated circuit (IC) material technology is the important foundation of IC technology development. The development of IC technology is accompanied by the research and application of new IC materials. New and emerging IC materials need to be introduced to advance IC technology. Meanwhile, the application of new materials opens new fields for IC technology. There is a wide range of materials for different device applications, such as logic device, memory device, optoelectronic device, etc. This chapter mainly focuses the emerging research materials for IC device application, such as diamond, graphene, carbon nanotubes, nanowires, etc. The material properties, potential applications, and recent progress of new IC materials are also addressed.