Auxiliary Material in Process

The auxiliary materials used for the IC manufacturing have many kinds of categories, which basically include high-purity special gases, precise processing materials for Si wafers, quartz products, ultra-pure chemicals, chemical mechanical polishing materials, and metal targets. Among them, the immersion fluid with high refractive index filled the gap between the final projection lens and the wafer in immersion lithography, acts as an additional liquid lens, which can improve the special resolution of photolithograph. The special gas with purity greater than 99.99% is necessary for the film deposition. Quartz products are indispensable accessories, mainly including quartz diffusion tube, quartz crucible, quartz bell jar, and quartz boat/basket/bracket. Ultra-pure chemicals commonly used in IC manufacturing have more than 30 kinds, like various acids, alkali, organic solvents, oxidizing reagents, etc. Besides, the polishing slurry, pads, and conditioning disc are necessary for the wafer polishing, as well as the aluminum, titanium, tantalum, copper, and other precious metal targets are used for electrode contacts and interconnects.