Main Common Parts

Common parts are an important basis for the development of the integrated circuit manufacturing equipment industry. Most of them, such as manipulator, equipment front-end module (EFEM), gas mass flow controller (MFC), gas panel, reaction chamber, scrubber, chiller, RF source, vacuum pump, and ultraclean stainless steel pipe (EP class), various pipe valves, quartz components, and silicon carbide (SiC) components, not only occupy a large proportion of equipment cost but also plays a very important supporting role in improving the performance level of integrated circuit manufacturing equipment. In fact, the production and R&D around these key common parts have formed a very large-scale supply chain system and economic entity and have created many international well-known enterprises. In this chapter, we give a detailed description that focuses on a number of these important common parts.