Metrology and Inspection Equipment

This chapter covers a key part of modern semiconductor chip manufacturing equipment, metrology, and inspection. It is divided into several sections, each addressing one specific type of equipment. Each type is presented in terms of the technology background, working principle and flow, and its application in chip manufacturing processes. In some sections, typical equipment specifications and major equipment models and makers are presented. Metrology and inspection field comprises a large number of equipment types which employ a wide range of different technologies. Due to limited space, only major and widely used equipment types are covered. To better serve general readers with diverse backgrounds and disciplines, the authors intentionally limited the use of technical terminology to suit readers with less technical backgrounds.