The Development of the IC Equipment Industry

IC manufacturing represents the highest level of ultra-micro machining technology today and continues to set the standards of manufacturing equipment. Equipment plays the most important role in the IC industry chain. After more than 60 years of development since the invention of IC in 1958, the IC equipment industry has undergone great changes. This chapter briefly introduces the development status and characteristics of IC equipment worldwide, including the development history and the current development situation of equipment industry in China.