Module Processes
摘要
A complete Si-based CMOS integrated circuit process flow usually includes hundreds to thousands basic steps, that is, “unit process” steps as described in Chap. 5. In manufacturing, several basic unit process steps can be grouped as a “module process” loop for a well-defined function (e.g., STI module, Gate stack, lithography align/exposure/develop/implant/PR-removal, Contact formation, Metal/Via formation by Dual-Damascene, etc.).