Silicon-Based Integrated Circuits

Bulk silicon (Si) substrates and silicon-on-insulator (SOI) substrates are the basic substrate materials for silicon-based ICs. Refer to Sect. 9 of this book for detailed information of polycrystalline Si, single crystal Si, Si wafer with epitaxy, SOI substrate, and testing of Si wafers. Si-based devices are the fundamental components of ICs. Si-based devices mainly include bipolar junction transistor (BJT), MOSFET, FinFET, fully depleted SOI (FD-SOI), super junction (SJ), lateral diffusion MOS (LDMOS), integrated passive device (IPD), etc.