Energy Savings and Development Trends

This chapter discusses the types of energy used in the typical IC production lines and some energy-saving methods for the reduction of power consumption. Generally, electric energy consumption is the main part, while others, e.g., city water, heat, natural gas, and air, are the secondary. To operate a cost-efficient fab, there are a lot of proven energy-saving practices as listed in this chapter, e.g., the optimization in air and water treatment, fab space design, and materials recycle as well as reclaim. Further, as the applications from consumer-end developed rapidly, the advanced IC production has increasingly progressed over recent decades with automation, new equipment, and technologies. China will continuously develop the capabilities in IC production and establish more advanced fabs in fast pace with high efficiency and technology levels. It is much more than massive capital investment, management experiences, and collaboration with partners toward long-term success. As the strong competition internationally, there will be more and faster development of IC production lines in future AI/IoT era.