Central Gas and Chemical Supply Systems

As the semiconductor industry continues to develop, the demand for ultra-pure gases and chemicals also keeps growing. Generally, gases and chemicals supplies can be outsourced to reliable third parties, but on-site central systems are also very critical. This chapter presents the classification and applications of bulk gases, special gases, and chemicals in a typical fab. It also introduces how to monitor and control the chemicals and gas usages for different fabrication processes of ICs.