Designing IC Production Lines
摘要
The key component in designing the IC production line is the manufacturing equipment which is 70–80% of overall project investment. Meanwhile, the required manufacturing equipment can vary significantly based on different product categories and technologies. This chapter provides an overview of essential aspects of designing a well-functional IC production line. It includes main buildings and structures, green plant design concept, green building evaluation and certification system, automated material handling system (AMHS), water supply and drainage system, well-equipped and effective fire-fighting systems, power systems, ultra-pure water system, wastewater treatment systems for five different chemical-based wastewaters, facility monitoring and control system (FMCS) for real-time status, and also the hook-up system connecting manufacturing equipment with all required conditions.