Location and Environmental Impact Assessment of IC Production Lines
摘要
It is a complex process to properly assess the location and environmental impact for the construction of an IC production line. The construction project should be carefully planned under the guidelines of overall planning and regulations. This chapter introduces all major factors of environment impact, including air, surface water, ground water, noise, and soil. Then the environment impact can be assessed by the four steps to identify impact factors, determine pollution factors, set control requirements, and finally select specific indicators for testing and evaluation. This chapter also lists common contaminants in mainstream IC production processes with the control measurement for reference.