Products of Sensors and MEMS

MEMS stands for micro-electro-mechanical system, generally integrated with microsensors, microprocessors, and micromechanical structures. Based on miniaturization technology, MEMS sensors, actuators, and microsystems, such as pressure sensors, inertial sensors, RF components and modules, micro-opto-electro-mechanical system (MOEMS), image sensors, biochemical and biomedical systems, energy harvesters, have been developed. They are widely used in auto industry, internet of things (IoT), smart phone, health care-related industry, etc. Several MEMS sensors are discussed in this chapter. Their progresses of technology, basic structures, and main applications are briefly described.