Invention of optical sensor has received considerable attention in both biological and chemical applications. In the proposed work, double, micro pillar integrated with microcantilever has been investigated with double square split ring resonator. In this work, sensor is analyzed for both air and water medium. Principle operation of proposed double square split resonator sensor design involves integrated moving mechanical pillar will continuously get deflected and fill the two air holes in the double square split resonator. Defected tip of microcantilever will fill the two air holes in the double square split ring resonator structure. As the pressure on the microcantilever increases, depth of penetration of micro pillar in the cavities increases. This penetration of micro pillar in the cavity will alter the propagation of light. Shift in wavelength is obtained for pressure generated. Power is transmitted up to 45% in air and 48% in water. Sensitivity of 230 nm/GPa is obtained for air medium and 120 nm/GPa for water.

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Integrated Micro Pillar Microcantilever Double Square Split Ring Resonator for Optical Sensing in Air and Water Mediums

  • Afzal Shaikh,
  • Manju Devi,
  • Ramjan Khatik,
  • Shaista Shaikh

摘要

Invention of optical sensor has received considerable attention in both biological and chemical applications. In the proposed work, double, micro pillar integrated with microcantilever has been investigated with double square split ring resonator. In this work, sensor is analyzed for both air and water medium. Principle operation of proposed double square split resonator sensor design involves integrated moving mechanical pillar will continuously get deflected and fill the two air holes in the double square split resonator. Defected tip of microcantilever will fill the two air holes in the double square split ring resonator structure. As the pressure on the microcantilever increases, depth of penetration of micro pillar in the cavities increases. This penetration of micro pillar in the cavity will alter the propagation of light. Shift in wavelength is obtained for pressure generated. Power is transmitted up to 45% in air and 48% in water. Sensitivity of 230 nm/GPa is obtained for air medium and 120 nm/GPa for water.