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Thin Film Preparation of Electro Ceramics

  • Suganeswaran Kandasamy,
  • Gobinath Velu Kaliyannan,
  • Raja Gunasekaran,
  • Parameshwaran Rathinasamy,
  • Nithyavathya Nagarajan,
  • Santhosh Sivaraj

摘要

Electro ceramics poses ability to conduct the electricity for various applications such as LEDs, microwave amplifiers, solar cells, high power switches, dielectric capacitors etc. In spite of mechanical, chemical and thermal stability, some ceramics hold excellent electrical, optical and mechanical properties. Thin film ceramic materials with negligible thickness were synthesized by increasing the temperature of non-metallic minerals especially for optical or electronic devices applications. Thin film electro ceramics can be deposited over substrates through various coating techniques such as spin coating, spray pyrolysis, pulsed laser deposition, metal organic chemical vapor deposition etc. Due to its high degree of adhesion, thin ceramic films found to remain intact with substrate surface. This chapter delivers the compilation of various techniques for the preparation of thin film electro ceramics.