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The overhead hoist transport (OHT) in the automatic material handling system (AMHS) plays an important role in wafer fabrication. In this paper, a micro-hoist hoist driven by servo motor on OHT frame is designed. Firstly, the hoisting system layout is modeled, then the hoisting device and the clamping device are designed. Secondly, the modal analysis of the hoisting device is carried out by ANSYS simulation software. Thirdly, the hoisting device is accurately positioned and controlled by PCL. Finally, it is concluded that the strength and stiffness of the lifting equipment meet the functional requirements, and can achieve a stable lifting of 12.5 meters per second. At the same time, the lifting equipment and the OHT frame will not produce resonance, which meets the design purpose.

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Design of Lifting Equipment of Wafer Unmanned Track Carrier

  • 会议论文

  • 发表日期：

    2025年

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  • Yin-Hong Yao,
  • Yi-Jui Chiu

摘要

The overhead hoist transport (OHT) in the automatic material handling system (AMHS) plays an important role in wafer fabrication. In this paper, a micro-hoist hoist driven by servo motor on OHT frame is designed. Firstly, the hoisting system layout is modeled, then the hoisting device and the clamping device are designed. Secondly, the modal analysis of the hoisting device is carried out by ANSYS simulation software. Thirdly, the hoisting device is accurately positioned and controlled by PCL. Finally, it is concluded that the strength and stiffness of the lifting equipment meet the functional requirements, and can achieve a stable lifting of 12.5 meters per second. At the same time, the lifting equipment and the OHT frame will not produce resonance, which meets the design purpose.