Design and Implementation of a Ceramic Pressure Sensor for Marine Applications

In recent years, the application of pressure sensors has become increasingly widespread, especially for marine pressure sensors which face harsher working environments. This paper addresses the limitations of silicon piezoresistive technology’s low tolerance, the poor overload resistance of ceramic resistive technology, and the restricted application range of glass micromelting technology in marine pressure sensors. A reliable and rational ceramic capacitive pressure sensor design is proposed. First, the pressure measurement principle of the ceramic capacitive core is introduced, followed by the establishment of a mathematical model for the ceramic capacitive diaphragm to calculate the relationship between pressure and diaphragm deflection. Using ANSYS software and setting its boundary conditions, meshing is performed separately for the diaphragm and the body, and the deflection change of the ceramic capacitive core diaphragm along the radial direction is calculated. The results of the established mathematical model and ANSYS simulation are basically consistent. Subsequently, the core components and chips of the designed sensor are introduced. The linearity, sensitivity, and repeatability parameters of the sensor are analyzed through experiments. The experimental results prove that the pressure sensor designed by this method performs well and meets practical needs, providing significant reference value for sensor design and application.