MOS Based Sensor Technology for Monitoring and Controlling of Gaseous Pollutants
摘要
One of the leading contributors to the global environmental burden is air pollution. Air pollution is the major concern as it contaminates atmospheric air by toxic gasses which are hazardous to human health, materials, vegetation and environment. The major air pollutants are oxides of nitrogen, oxides of Sulphur, oxides of carbon, hydrocarbons etc., from Industries, automobiles and naturally occurring phenomena such as volcanic eruption, forest fire etc. It is observed that treatment of these harmful gasses from vehicular/Industry exhaust is possible by various pre and post combustion techniques. One of the post combustion techniques is using electrical discharges (Non-Thermal Plasma/NTP) has shown promising results in the laboratory. NTP method is oxidizing in nature hence converting the lower oxides of nitrogen (NO & NO2) to higher oxides of nitrogen (N2O4 & N2O5). In order to provide the ideal solution, detection and monitoring of these oxides of nitrogen has become contented lately. Therefore, the current work is intended to design a cost-efficient, fast response, compact and effective gaseous sensor to detect the higher oxides of nitrogen majorly. The sensitivity of the targeted gaseous pollutant on the sensor was analyzed using COMSOL Multiphysics 6.1 by performing the modal analysis by varying the Eigen frequencies which influenced the pressure, velocity and temperature of the gas sensor model created.