Dynamics and Load Analysis of Micro-hydraulic Actuator Controlled Through Multiple Micropumps

This research paper investigates the dynamics and load analysis of a micro-hydraulic actuator controlled through multiple PZT micropumps. The miniaturization trend in electronic components has led to increased interest in micromechanical systems. Micro-actuators offer advantages of speed, accuracy, and cost-effectiveness compared to larger systems. Hydraulic actuation, with its high-power density and immunity to electromagnetic and electrostatic interferences, has emerged as a promising method for high-performance micro-actuators. In this study, we present detailed investigations on load analysis for an asymmetric micro-hydraulic actuator. An experimental setup was developed, consisting of the actuator, multiple PZT micropumps, micropump drivers, and data acquisition systems. The micropumps were operated in parallel to control the actuator at different frequencies and voltages. Measurements of actuator displacement under various load and no-load conditions were recorded using sensors and instrumentation. The results provide valuable insights into the dynamics and load characteristics of the micro-hydraulic actuator, enabling the optimization of its performance. The study demonstrates the feasibility and effectiveness of using multiple micropumps in parallel to control the actuator, opening new possibilities for advanced micro-hydraulic actuation systems.