Solidly Mounted BAW Resonator Using KNbO3 Thin Film for 5G Application

Since about a decade ago, AlN and ZnO have been utilised as active elements in the design of resonators. Due to their high piezoelectric coefficients and fast acoustic velocities, ferroelectric materials have recently attracted attention as active components in resonators. We use KNbO3 as the active element in our application since all ferroelectric materials are piezoelectric. Using KNbO3 as the piezoelectric material, a solidly mounted resonator for 5G applications is designed in this research. Finite element simulations run on the COMSOL multiphysics software are used to evaluate the SMR's properties. The designed device has a good return loss and a Q-factor of 1376 at 5.35 GHz, according to simulation data. SMR devices with high resonance frequencies are beneficial for 5G application.