Thermoelastic Damping in a Perforated MEMS Resonators

This paper focuses on the study and analysis of the quality factor of perforated microelectromechanical systems (MEMS) resonators in consideration of thermoelastic damping. The energy dissipation mechanism by thermoelastic damping highly affects the Q-factor of the MEMS resonator. Here, the modelling and analysis of perforated MEMS resonators have been done using the finite element-based COMSOL Multiphysics software. The quality factor due to thermoelastic damping for a simple fixed-fixed beam resonator (without perforation) is 8377, whereas its value for the completely perforated beam is comparatively higher at 11,572. The variations of perforation length with Q-factor and natural frequency, respectively, have been studied. Further, the obtained computational result has been validated with the analytical model for thin beams.