Nanoelectromechanical Switches: As a Steep Switching Device
摘要
This chapter provides a comprehensive analysis of nanoelectromechanical systems (NEMS) switches as highly efficient switching devices. It explores the development of early automatic systems to modern silicon-based technologies. It highlights the advantages of NEMS switches over conventional semiconductor devices, highlighting features like low-power consumption, high ON-current, and ideal subthreshold slope. The chapter delves into various actuation mechanisms, fabrication techniques, and discusses development challenges such as scalability and integration. The text also explores the capabilities of NEMS switches in terms of energy efficiency, precision sensing, and improved performance in communication. It highlights the significant impact these switches can have on nanoelectronics.