Focus Adjustable Metalens Based on MEMS Driver
摘要
Micro-lens with adjustable focus is an important part of optical system and has a wide range of applications. The size of conventional optical lenses limits their performance. Metasurface is a small, thin and new optical device with precise phase modulation function. In this paper, the focus adjustable structure integrated with metasurface and vertical comb MEMS driver is designed. The focus moves precisely with the regulation of voltage. The response time of the structure is only 16 ms, which can achieve high-speed adjustment, and the 1 to 5 modes of the structure have high frequencies, which can effectively reduce the interference of external frequencies. The focal length of the lens is designed to be 25 um, and the focus of this structure varies from 13.4 to 25 um.