A Comparative Study of Cantilever Profiles for MEMS Applications
摘要
The micro-electro-mechanical system (MEMS) is a revolutionary enabling technology that has been the driving factor behind many recent technological advances. Many of these microsystems are made up in the form of microcantilevers and are designed to carry out specific tasks by monitoring variations in cantilever bending or vibrational frequency. In order to determine the optimal cantilever profile for both dynamic and static modes, modal analysis is done on the various cantilever profiles in this work. Additionally, all the simulation findings are validated with analytical results from past literature. Out of the three profiles tested in the work, the varying-width profile performed better from a resonant frequency point of view. In static mode, a varying-width profile is also better from a stress point of view.