A Capacitive Inkjet Printed Humidity Sensor on a Paper Substrate
摘要
This paper presents a parallel plate capacitive humidity sensor using the paper substrate. The sensor was fabricated by inkjet printing silver electrodes on each side of a 205 μm thickness paper substrate. The top electrode was mesh type. Experiments were conducted to determine the static and dynamic response parameters of the sensor with variation of humidity from 0 to 50% RH. The electrical response parameters are sensitivity 2.40 pF/% RH, rise time 5 min. The device is simple in fabrication, inexpensive, and biodegradable, and multiple identical sensors can be made in large quantities in less time. However, due to the thick sensing film, the response time and hysteresis error are high. These parameters can be improved by proper selection of the optimum pore size of the mesh, the dimension of the electrodes, and adding an extra sensing film. The output is precise, repeatable, and suitable for many day-to-day common applications.