The Effect of Various Coil Parameters on Inductively Coupled Plasma Reactor: A Numerical Simulation

The study of the profiles of temperature and flow field in inductively coupled plasma under varying coil parameters can serve as a valid reference for the design of inductively coupled plasma devices used for the subject of carbon dioxide. First, a two-dimensional axisymmetric model of inductively coupled plasma (ICP) is established. Then, based on the local thermodynamic equilibrium conditions, a multi-field coupling approach including the flow field, the electromagnetic field, and the temperature field is used for the numerical simulation of a pure argon plasma with the COMSOL fine element simulation software and the effects of coil parameter variations on the spatial distribution of temperature and plasma density in the cavity were studied. The research results show that a suitable coil radius and spacing can significantly improve the uniformity of the plasma, while also affecting the core temperature of the plasma. Thus, the temperature and flow field distribution in the torch can be controlled by adjusting the parameters of each coil to meet the requirements of efficient treatment of carbon dioxide.