Determination of Main Parameters of Air Floating Support System for Liquid Crystal Glass Substrate and Its Influence on Micro-Vibration of Glass Substrate

The physical model of air floating support is established, and calculation formulas of air supply pressure, air film thickness and throttle hole diameter are derived from the formula. The maximum amplitude of the vibration of the glass substrate is measured under the condition of constant air film thickness and constant diameter of the throttle hole, respectively, and the influence law of the main parameters of the air floating system on the maximum amplitude of the micro-vibration of the glass substrate is obtained. On this basis, the main parameters of an engineering prototype air floating system were designed as follows: air film thickness 50 μm, air supply pressure 220 Pa, throttle hole diameter 0.25 mm, and the prototype air floating support system was developed. The test results of the developed prototype of the air floating show that the maximum amplitude of the glass substrate is 0.31 μm, which is less than the design requirement of 1 μm. The experimental results show that the air floating support prototype meets the design index requirements.