Linear Inertial Motor with Double Piezo Actuator for Improving Motion Deviations Between Positive and Negative Directions

Due to their high-resolution, non-electromagnetic nature, power-off self-locking feature, simple structure, and easy control, linear inertial motors have garnered significant attention in the optics industry. However, a common issue faced by most reported inertial motors is significant deviations between positive and negative motions. This study aims to propose a linear inertial motor with a double piezo actuator to mitigate motion deviations to a certain extent. The motor's operation is based on the principle of inertia, utilizing two sawtooth wave voltages with mirror symmetry to drive its motion. Firstly, the motor's design and operating mode are presented. Subsequently, the feasibility of the model design is demonstrated by analyzing a double piezo actuator using commercial finite element software COMSOL. Finally, the prototype motor is fabricated and verified by a series of experiment tests. The results indicate that the forward and reverse speeds are 20.63 and 20.12 mm/s, respectively, with a speed deviation of 2.48%, significantly lower than previous motors. The experiment validates the effectiveness of the linear inertial motor with a double piezo actuator as reported.