Parylene Membrane Transfer on PDMS Microchannel for Microvalve Fabrication

This abstract describes the process for membrane transfer of thin parylene membrane. This is a key step in fabricating pneumatic microvalves with parylene due to their hyperelasticity and biocompatibility. It is an attractive material for such applications. This paper describes two processes for the transfer of parylene to a PDMS chip. In microvalve fabrication, the most crucial step is the transfer of a thin membrane onto a PDMS chip containing the microfluidic structures. This transferred Parylene membrane seals the channels of variable length and 10 µm depth over the device side of PDMS.