A Capacitive Transducer for Film Thickness Measurement
摘要
In this abstract, a simple, low-cost parallel plate capacitive transducer has been designed, fabricated, and tested to measure the thickness of the film. Initial experiments have been performed to measure the thickness of the micrometre order to the millimetres of different insulating substrates like Teflon film, alumina film, and glass substrates. The thickness measurement results are encouraging, and the proposed method may be used for industrial and laboratory applications.