Effect of Grain Size on Dynamic Mechanical Properties of Layered Grating Aluminum Film

Diffraction grating is a high-precision optical element. In order to study the effect of grain size on the mechanical properties of grating, nanoindentation experiments were carried out on aluminum films with different grain sizes. The stress-strain curves obtained from the experiments show that the stress and grain size conform to the Hall-petch relationship. The modified Johnson-cook model was used to fit the constitutive curve of the sample and compared with the experimental curve. In this paper, the grain size was combined with the grating for the first time, and the effect of grain size on the dynamic mechanical properties of the grating aluminum film was revealed. Provide reference and basis for subsequent research.