This study deals with the development of two optical components: a microlens array for air floating images and a periodic V-groove structure for anti-reflection. In the development of the microlens array, optical design and mold manufacturing methods are examined to simultaneously improve the resolution and the viewing angle of the floating image. Geometries of the microlens array are optimized using an optical design software CODE-V and the floating image is simulated using LightTools. Subsequently a cutting experiment of the micro-lens array mold with a single crystalline diamond tool is conducted using an ultraprecision 5-axis machine tool. An electroless Ni-P plating with a diagonal of 6.5 inches is used as a workpiece, and the changes in form error are evaluated. As a result, a resolution of MTF 0.5 at 1 cycle/mm and a viewing angle of 45° is achieved. Changes in form error of the mold is 1.08 μm at most, that is the next challenge. To improve the uniformity of the form accuracy, a new method of semiconductor processing is also introduced. In the development of periodic V-grooves, a new cutting method called “Nano-Pecking” is applied to improve machining efficiency. A single crystalline diamond tool with a wedge angle of less than 50° is vibrated by an ultrasonic oscillator. V-grooves can be machined at several tens of times larger pick feed than the ordinary method. Periodic V-groove structures with a pitch of 200 nm is successfully ma-chined on a 20 mm square electroless Ni-P plated workpiece.