Fabrication of a Microchannel Through Selective Jet-Based Electrochemical Machining
摘要
Microchannel fabrication through jet-based electrochemical machining (ECM) is a highly precise and efficient technique commonly employed in microelectromechanical systems (MEMS), microfluidics, and other miniaturized device applications. This article focuses on utilizing the selective jet-based electrochemical machining process to fabricate microchannels, which involves selectively using an electrolyte jet to dissolve material from a workpiece. This method enables the creation of intricate microchannels with high aspect ratios and precise dimensions, as the material is removed atom by atom, making it suitable for micromachining conductive materials without being hindered by hardness. The research examines the influence of input parameters, particularly horizontal scanning speed and applied potential, on the width and depth of microchannels. A raster toolpath-based strategy is employed for microchannel fabrication, providing a systematic approach for guiding the electrolyte jet to achieve the desired channel patterns. The fabricated microchannels are analyzed for smoothness and compactness, with thorough descriptions regarding the measurement techniques for machining depth and width, showcasing the precision and accuracy achieved through the ECM process.