Realization of Sub-pF Capacitance Standards at Audio Frequency
摘要
The realization of a sub-pF capacitance standard is challenging, especially at audio and radio frequencies, which are critical for the semiconductor industry, serving as the backbone for electrical and electronic systems. In the proposed work, we demonstrate the realization of a sub-pF capacitance range using a dielectric test fixture based on parallel plates with guarded electrodes. Capacitance ranging from 100 fF to 1 pF is addressed for 1 kHz. Subsequently, capacitance is measured using a precise LCR meter, and the capacitance bridge, measured capacitance aligns well with theoretical capacitance. The uncertainty in measurement for the capacitance standards has been computed according to the guidelines outlined in the GUM document.