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A dielectric-modulated MOS-HEMT for neutral biomolecule detection is presented. A cavity close to the source, under the gate with 500 nm length and 10 nm width is embedded for modulation of the dielectric. In view of the specific application, Biotin (K = 2.63) and Glucose-oxidase (K = 3.46) are chosen as bio-elements for detection. Drain current and threshold voltage variations are considered sensitivity metrics for detection. Drain current variations of 19 mA and 29.6 mA along with threshold voltage deviations of 0.95 V and 1.61 V are obtained for Biotin and Glucose-oxidase, respectively, from device characteristics without any biomolecules in the cavity region. The effect of Fill Factor (FF) on the sensitivity of the device for neutral biomolecule detection is studied in terms of \(\Delta I_\text {DS}\) and \(\Delta V_\text {th}\) . In particular, 75, 50, and 25% filled cavities are considered for observation.

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Influence of Micro Cavity Fill Factor on Sensitivity Performance of MOS-HEMT Device-Based Biomolecule Detector

  • 会议论文

  • 发表日期：

    2025年

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  • Burra Mahesh,
  • Ashish Kumar,
  • Washim Reza Ali

摘要

A dielectric-modulated MOS-HEMT for neutral biomolecule detection is presented. A cavity close to the source, under the gate with 500 nm length and 10 nm width is embedded for modulation of the dielectric. In view of the specific application, Biotin (K = 2.63) and Glucose-oxidase (K = 3.46) are chosen as bio-elements for detection. Drain current and threshold voltage variations are considered sensitivity metrics for detection. Drain current variations of 19 mA and 29.6 mA along with threshold voltage deviations of 0.95 V and 1.61 V are obtained for Biotin and Glucose-oxidase, respectively, from device characteristics without any biomolecules in the cavity region. The effect of Fill Factor (FF) on the sensitivity of the device for neutral biomolecule detection is studied in terms of \(\Delta I_\text {DS}\) and \(\Delta V_\text {th}\) . In particular, 75, 50, and 25% filled cavities are considered for observation.