This study explores the fabrication of a micro-dimple substrate using the Hot embossing (HE) technique with High-Density Polyethylene (HDPE) as the material. In this paper, various experiment parameters were chosen, varying temperature, force, and holding time. The Response Surface Methodology (RSM) with three parameters was employed to analyze and evaluate the relevant linkage of HE parameters to the dimensional accuracy and surface roughness of the micro-dimple profile. The findings indicated that HE force is the primary factor in maintaining dimensional accuracy and surface quality. This result proved that HE is a reliable process for fabricating high-accuracy HDPE micro dimple substrates with high dimensional accuracy and surface finish.