Generally, profile measuring machines measure the contour profile of a workpiece by means of a displacement sensor moving on a moving stage axis and its sensor output. However, this method assumes that the movement of the stage on which the displacement sensor is mounted is known in advance or is linear. However, this assumption is not always correct. The movement axis error of a linear stage has a significant impact on the measurement. One approach to solving this problem is profile separation, and typical measurement methods are the inversion method and the multipoint method. However, each method has its own problems. In the inversion method, the workpiece is measured once, then inverted 180 degrees and measured again, and profile separation is performed based on the relationship between the two measurements. This method requires the incorporation of a mechanism for inversion in the measurement device, which makes the entire device larger, and causes rotational errors during the inversion operation. The multi-point method calculates the profile error of the moving stage axis by measuring with multiple displacement sensors. The problem with this method is that it is prone to profile errors at the zero-point due to the use of multiple displacement sensors. In this paper, we propose a measurement method that uses two independent linear stages and only one displacement sensor. In this method, the displacement sensor and the workpiece to be measured are placed on two independent linear stages, and the displacement of the displacement sensor is measured and calculated.

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The Extraction Method of Profile Based on Two Linear Stage Movement

  • Itsuki Matsumura,
  • Ryoshu Furutani,
  • Miyu Ozaki

摘要

Generally, profile measuring machines measure the contour profile of a workpiece by means of a displacement sensor moving on a moving stage axis and its sensor output. However, this method assumes that the movement of the stage on which the displacement sensor is mounted is known in advance or is linear. However, this assumption is not always correct. The movement axis error of a linear stage has a significant impact on the measurement. One approach to solving this problem is profile separation, and typical measurement methods are the inversion method and the multipoint method. However, each method has its own problems. In the inversion method, the workpiece is measured once, then inverted 180 degrees and measured again, and profile separation is performed based on the relationship between the two measurements. This method requires the incorporation of a mechanism for inversion in the measurement device, which makes the entire device larger, and causes rotational errors during the inversion operation. The multi-point method calculates the profile error of the moving stage axis by measuring with multiple displacement sensors. The problem with this method is that it is prone to profile errors at the zero-point due to the use of multiple displacement sensors. In this paper, we propose a measurement method that uses two independent linear stages and only one displacement sensor. In this method, the displacement sensor and the workpiece to be measured are placed on two independent linear stages, and the displacement of the displacement sensor is measured and calculated.