To meet the requirements of uniform and stable discharge plasma, high ionization efficiency and fast plasma diffusion, a bipolar 10 kV 1 kW high-voltage pulse power is designed with the adjustable amplitude and pulse width. The proposed scheme adopts SiC Buck-LLC topology, which can produce a controlled amplitude of 5 kV ~ 10 kV. As the SiC MOSFET rising edge is at ns level, the high precision pulse is realized to improve discharge stability. The 10 kV high-voltage pulse source simulation is built in MATLAB to verify the circuit principle and the prototype is built to verify the proposed topology.

错误:搜索内容不能为空,请输入英文关键词
错误:关键词超出字数限制,请精简
高级检索

Design of High Voltage Pulse Generator Based on SiC Resonant Circuit in 10 kV Dielectric Barrier Discharges Applications

  • Chaohui Cui,
  • Xirui Zhu,
  • Xin Wang,
  • Haoran Li,
  • Xinyue Guo,
  • Lidong Liu,
  • Cungang Hu

摘要

To meet the requirements of uniform and stable discharge plasma, high ionization efficiency and fast plasma diffusion, a bipolar 10 kV 1 kW high-voltage pulse power is designed with the adjustable amplitude and pulse width. The proposed scheme adopts SiC Buck-LLC topology, which can produce a controlled amplitude of 5 kV ~ 10 kV. As the SiC MOSFET rising edge is at ns level, the high precision pulse is realized to improve discharge stability. The 10 kV high-voltage pulse source simulation is built in MATLAB to verify the circuit principle and the prototype is built to verify the proposed topology.