Design and Analysis of a MEMS-Based Resisto-capacitive Gas Sensor
摘要
A resisto-capacitive sensor featuring an Au-patch electrode with an Ag-SnO2/SiO2/Si structure, integrated with a microcontroller, was designed and developed for the detection of low concentrations (ppb to ppm range) of volatile compounds (NH3, TMA, ethanol, and H2S) emanating from fish spoilage at room temperature. Unlike common sensors, the presented design aimed to provide high selectivity owing to its resisto-capacitive nature. The proposed sensor, coupled with our streamlined approach, holds great promise for offering a portable, cost-effective, and swift on-site evaluation of fish spoilage at room temperature.