Design, Fabrication and Characterization of PVDF Acceleration Sensor
摘要
This paper presents the design, fabrication and characterization of acceleration sensors utilizing PVDF (poly vinylidene fluoride) as the sensing element, with a piezoelectric coefficient of 18 pC/N. The sensors, constructed in the compression mode are capable of operating at higher acceleration and operational frequencies unlike the low ‘g’ and low frequency sensors constructed in the bending mode. The sensing elements, fabricated using hot pressing technique, were configured for detecting out-of-plane vibration, with the sensing element sandwiched between a pair of copper electrodes and force applied corresponding to the acceleration stimuli via a seismic mass. Simulation results predicted the mounted resonance frequency at 18.4 kHz indicating a wide operational frequency range. Four sensors were constructed, incorporating sensing elements with diameters of 9 mm and 8 mm to study the effect on sensitivity for the same seismic mass. The sensors were tested across an acceleration range spanning 30 g, covering frequencies up to 2 kHz. The sensitivity of the sensors was assessed in terms of voltage response, with the maximum peak-to-peak voltage recorded in the range of 290 to 340 mV. The overall dimensions of the packaged sensors are 17 mm in length and 12 mm in diameter. The sensors exhibited excellent acceleration response with good linearity.