Closed-Loop Differential Capacitive MEMS Accelerometer with a Compound Lever-Based Compliant Mechanism
摘要
In this work, we introduce a novel approach to enhance the sensitivity of a MEMS accelerometer through the incorporation of a compliant displacement amplifier. The primary objective of our study is to not only amplify sensitivity but, more importantly, to improve the bandwidth of the sensor. Our investigation involves the utilization of a MEMS accelerometer featuring a compound lever-based compliant mechanism, which has been thoroughly analyzed employing a reduced order modeling approach facilitated by MEMS+ software. The implementation of the compliant displacement amplifier provides a 36% improvement in the sensor’s bandwidth. This enhancement is attributed to the effective utilization of the compliant mechanism, demonstrating its potential to extend the operational range of MEMS accelerometers. To further optimize the accelerometer’s performance, a closed-loop control strategy is introduced. Through modeling and analysis, we establish that employing the closed-loop approach results in an accelerometer non-linearity of less than 0.5% across a ±30g range. This highlights the effectiveness of the closed-loop control strategy in mitigating nonlinearity issues, ensuring the reliability and precision of the MEMS accelerometer across a wide range of accelerations. Our findings offer a practical and innovative solution for improving both sensitivity and bandwidth. The integration of a compliant displacement amplifier, coupled with closed-loop control, provides a comprehensive approach to address key challenges in MEMS accelerometer performance, offering new advancements in inertial sensing technologies.