This paper presents a design of MEMS based Micromirror which is used for deflection of signal in various aspects. The performance of the mirror can be improved by choosing different dimensions and combination of materials. The Micromirror is constructed using 4 BETA (Bimorph Electrothermal Actuator) for all round angle deflection. The most effective design which is observed after all small-scale analysis with voltage range from 1 to 3 v is 2050 μm. Similar to that, there are a total of 3 different dimensional designs, which are 1750 μm, 2050 μm and 3050 μm in which 2050 μm design showed better and appropriate results for real time usage. This micromirror is designed using COMSOL multiphysics tool in micro-level scale. Micromirror is completely dependent on the angle for which we need the deflection to happen and deflection is observed in change of input voltage value. The role of input voltage is very crucial in driving angle-dependent deflection which underscores the micromirror’s versatility in signal manipulation tasks across various domains.

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Design and Analysis of MEMS Based Micromirror

  • C. Joshitha,
  • Puneeth Babu,
  • B. S. Sreeja

摘要

This paper presents a design of MEMS based Micromirror which is used for deflection of signal in various aspects. The performance of the mirror can be improved by choosing different dimensions and combination of materials. The Micromirror is constructed using 4 BETA (Bimorph Electrothermal Actuator) for all round angle deflection. The most effective design which is observed after all small-scale analysis with voltage range from 1 to 3 v is 2050 μm. Similar to that, there are a total of 3 different dimensional designs, which are 1750 μm, 2050 μm and 3050 μm in which 2050 μm design showed better and appropriate results for real time usage. This micromirror is designed using COMSOL multiphysics tool in micro-level scale. Micromirror is completely dependent on the angle for which we need the deflection to happen and deflection is observed in change of input voltage value. The role of input voltage is very crucial in driving angle-dependent deflection which underscores the micromirror’s versatility in signal manipulation tasks across various domains.