The previous chapter (Chap. 3 ) introduced the precision measuring instrument with HeNe dual-frequency laser as the light source, and this chapter will specifically introduce the precision measuring instrument with microchip solid-state laser as the light source. The microchip material is Nd:YAG or Nd:YVO4, the thickness of the microchip is about 1mm, and the diameter (or diagonal of the square) is a few millimeters. Two smooth surfaces of microchip are coated with laser reflection film. The microchip is optically pumped by a LD with a wavelength of 0.808 μm to generate laser oscillation of 1.06 μm, which is just the microchip laser. The output power of a microchip solid-state laser ranges from a few milliwatts to a few hundred milliwatts. Although the power is small, it is enough to be used as a light source for precision measuring instruments. Traditional precision instruments rarely use microchip solid-state lasers as light sources. Based on the microchip laser structures and laser phenomena described in Sects. 1.7 – 1.9 and 2.10 of this book, this chapter will introduce the eight types of precision measuring instruments investigated by the team. The light source of the eight types of instruments is either orthogonal polarization or dual-frequency operation, and can be divided into four cases. (1) The microchip laser itself outputs light of two different frequencies and orthogonal polarization; (2) a beam of one frequency is modulated into two frequencies by an acousto-optic modulator; (3) The microchip laser array outputs two or more parallel propagating laser beams; (4) The laser beam forms orthogonal polarized components in the outer cavity. Instrumental techniques in this chapter include: (1) Common-path (or quasi-common-path) feedback interferometer (based on laser feedback), (2) In-plane and vertical displacement measurement, (3) thermal expansion coefficient measurement of materials, (4) remote vibration measurement, (5) birefringence/stress measurement of glass materials based on laser feedback, (6) microchip birefringence dual-frequency laser interferometer, (7) microchip solid-state laser confocal feedback measurement technology, (8) microchip solid-state laser feedback surface scanning imaging and step height measurement. In addition to the above eight instruments, this chapter will also introduce two other experimentally proven measurement systems: the 20-meter long flexible optical path (fiber transmission) displacement measurement system and the orthogonal-polarization single-beam displacement measurement system.

Precision Measurement Instrument with Microchip Solid Dual-Frequency Lasers

章节
发表日期：

2025年

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Shulian Zhang

摘要

The previous chapter (Chap. 3 ) introduced the precision measuring instrument with HeNe dual-frequency laser as the light source, and this chapter will specifically introduce the precision measuring instrument with microchip solid-state laser as the light source. The microchip material is Nd:YAG or Nd:YVO4, the thickness of the microchip is about 1mm, and the diameter (or diagonal of the square) is a few millimeters. Two smooth surfaces of microchip are coated with laser reflection film. The microchip is optically pumped by a LD with a wavelength of 0.808 μm to generate laser oscillation of 1.06 μm, which is just the microchip laser. The output power of a microchip solid-state laser ranges from a few milliwatts to a few hundred milliwatts. Although the power is small, it is enough to be used as a light source for precision measuring instruments. Traditional precision instruments rarely use microchip solid-state lasers as light sources. Based on the microchip laser structures and laser phenomena described in Sects. 1.7 – 1.9 and 2.10 of this book, this chapter will introduce the eight types of precision measuring instruments investigated by the team. The light source of the eight types of instruments is either orthogonal polarization or dual-frequency operation, and can be divided into four cases. (1) The microchip laser itself outputs light of two different frequencies and orthogonal polarization; (2) a beam of one frequency is modulated into two frequencies by an acousto-optic modulator; (3) The microchip laser array outputs two or more parallel propagating laser beams; (4) The laser beam forms orthogonal polarized components in the outer cavity. Instrumental techniques in this chapter include: (1) Common-path (or quasi-common-path) feedback interferometer (based on laser feedback), (2) In-plane and vertical displacement measurement, (3) thermal expansion coefficient measurement of materials, (4) remote vibration measurement, (5) birefringence/stress measurement of glass materials based on laser feedback, (6) microchip birefringence dual-frequency laser interferometer, (7) microchip solid-state laser confocal feedback measurement technology, (8) microchip solid-state laser feedback surface scanning imaging and step height measurement. In addition to the above eight instruments, this chapter will also introduce two other experimentally proven measurement systems: the 20-meter long flexible optical path (fiber transmission) displacement measurement system and the orthogonal-polarization single-beam displacement measurement system.