In the manufacturing process, manufacturing system reliability is a significant factor to ensure product quality and productivity, and also an important indicator to measure the performance of the manufacturing system. In principle, the manufacturing system as a special form of product existence, its reliability optimization technology can be common with the traditional reliability optimization technology, however, there are obvious defects in this approach. Firstly, the traditional reliability modeling technology focuses on the product’s own function embodiment, and studies product malfunction situation. But the manufacturing system, as the medium of a certain product output, has the consistency of its function with the product’s functional characteristics. And the manufacturing system also has its own specificity. Therefore, reliability optimization techniques that only consider the failure of the manufacturing system itself are obviously one-sided. Moreover, with the development of manufacturing technology, a large amount of data characterizing the manufacturing process’ state can be promptly obtained. Therefore, it is very meaningful to establish a fast and practical manufacturing system reliability modeling and preventive maintenance technology based on manufacturing process quality data.