SF6 is widely used in high-voltage power insulation equipment because of its excellent insulating properties and arc extinguishing ability. However, SF6 is a strong greenhouse gas, and its degradation can greatly reduce the harm of SF6 to the atmosphere. There are many kinds of toxic and harmful substances in SF6 decomposition products, among which SO2F2, as the main decomposition product of SF6, still has a greenhouse effect and a certain degree of toxicity, and the treatment of SO2F2 can improve the harmless degradation process of SF6. In this paper, DBD plasma synergistic filler materials were used to degrade SO2F2, and the influence laws of γ-Al2O3 and ZSM-5 on SO2F2 degradation were investigated. It was found that the addition of filler materials can effectively increase the discharge power of the reactor, which in turn improves the DRE and EY of SO2F2, and also changes the selectivity of the SO2F2 degradation products to a certain extent. The DRE and EY of 2% SO2F2 at a flow rate of 150 ml/min and a power of 100 W with γ-Al2O3 filling was 92.31% and 7.57 g/kWh, respectively, and the SO2F2 decomposition products mainly consisted of SO2, SOF2, SOF4, and SiF4, etc., of which the concentration of SO2 reached 14078.56 ppm. Under the same experimental conditions, ZSM-5 filling resulted in almost complete directed decomposition of SO2F2 to SO2, at which time the SO2 content was 16908 ppm. The results provide a theoretical basis for the efficient degradation of SO2F2 and the harmless treatment of SF6.