Design and Optimization of High Linearity Quartz MEMS Resonator
摘要
Current research on temperature-sensitive resonators mainly focuses on sensitivity, often neglecting the critical indicator of linearity. However, linearity plays a key role in enhancing the accuracy and precision of measurements, as it ensures the stability and predictability of frequency shifts. Insufficient linearity can lead to unstable frequency fluctuations or shifts, adversely affecting device performance. This study delves into the temperature-frequency characteristics of quartz crystals, enabling the fundamental acquisition of design and optimization results for highly linear quartz resonators. This results in a new notch type quartz resonator, \(ZYwt (-163^\circ /-72^\circ )\) , which improves linearity from 8.094% to 0.055%.